92071222B-STD Abstract: SEMASPEC Provisional Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers (MFCs)

SEMATECH DOC ID #: 92071222B-STD

Title: SEMASPEC Provisional Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers (MFCs)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;reproducibility;

Abstract: This test method provides a procedure for characterizing mass flow controllers
(MFCs) being considered for installation into high-purity gas distribution
systems. This method will quantify reproducibility and zero drift of a
thermal MFC. This revision of the document incorporates changes made as a
result of industry review and from corrections made during working session
four of the MFC Test Methods Development Task Force. This document is in
development as an industry standard by Semiconductor Equipment and Materials
International (SEMI). When available, adherence to the SEMI standard is
recommended.

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