92071221B-STD Abstract: SEMASPEC Provisional Test Method for Determining Accuracy, Linearity, Repeatability, Short Term Reproducibility, Hysteresis, and Deadband Thermal...

SEMATECH DOC ID #: 92071221B-STD

Title: SEMASPEC Provisional Test Method for Determining Accuracy, Linearity, Repeatability, Short Term Reproducibility, Hysteresis, and Deadband Thermal...

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;repeatability;reproducibility;

Abstract: This test method provides a procedure for characterizing mass flow controllers
(MFCs) being considered for installation into high-purity gas distribution
systems. This method will quantify the accuracy, linearity, repeatability,
short term reproducibility, hysteresis, and deadband of a thermal MFC. This
revision of the document incorporates changes made as a result of industry
review and from corrections made during working session four of the MFC Test
Methods Development Task Force. This document is in development as an industry
standard by Semiconductor Equipment and Materials International (SEMI). When
available, adherence to the SEMI standard is recommended.

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