SEMATECH DOC ID #: 92071220B-STD

Title: SEMASPEC Guide to Provisional Test Methods for Mass Flow Controllers (MFC)

Author(s): Jeff Riddle;

Document date: 03/04/1993

Descriptor(s): test methods;mass flow controllers;gas distribution systems;

Abstract:  This guide provides supplementary information about several test procedures
available for testing mass flow controllers (MFCs). It is also intended to
serve as a summary of the methods. This revision of the document incorporates
changes made as a result of industry review and from corrections made during
working session four of the MFC test methods development task force. It does
not provide detailed information sufficient for conducting the procedures, but
rather discusses and cites the applicable test method or standard. This
document is in development as an industry standard by Semiconductor Equipment
and Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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