SEMATECH DOC ID #: 92051107A-STD

Title: SEMATECH Guide for Contamination Control in Design, Assembly, and Delivery of Semiconductor Manufacturing Equipment

Author(s): Nora Sylvestre;

Document date: 08/21/1992

Descriptor(s): 

Abstract:  The purpose of this document is to establish a guide for contamination control
in the design, assembly and delivery of equipment for manufacturing devices
with 0.35 micron minimum design rules. This guide is intended to assist the
device manufacturer by providing a basis for the development of unique build
specifications for individual tools. It will assist the tool manufacturer in
the development of new tools, materials, assembly techniques, and facilities
to meet the design rules. The guide also may establish a framework for
discussion between customer and supplier and a possible basis for joint
development. A softcopy of this document is also available. SEMATECH has
granted copyright permission to SEMI to develop this document for industry
standards. Portions of this document have been incorporated into the SEMI
Tool Accommodation Standard.

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