SEMATECH DOC ID #: 10065106A-ENG

Title: 450 mm Equipment Maturity Assessment (EMA) Handbook

Author(s): Lorn Christal;

Document date: 07/22/2010

Descriptor(s): equipment performance;test methods;procedures;standards conformance;

Abstract:  This handbook provides guidance to those performing a 450 mm
equipment maturity assessment (EMA). It describes the 24
equipment characteristics that must be evaluated to determine
equipment maturity. The phase of maturity is critical to
subsequent demonstration tests as it ensures the optimum
allocation of test resources. Also included are preparatory
activities, procedures, reporting requirements, and checklists
that should be used to cite results for each characteristic.

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