SEMATECH DOC ID #: 10065105A-ENG

Title: 450 mm Demonstration Test Method (DTM)

Author(s): Lorn Christal;

Document date: 07/22/2010

Descriptor(s): equipment;equipment testing;reliability testing;test methods;

Abstract:  The 450 Demonstration Test Method (DTM) is a guideline for
characterizing the process performance and reliability of
semiconductor IC process and metrology equipment at any stage of
development maturity. It provides a method for experimentation
scaled to the maturity of the tool or process being tested. The
DTM reflects requirements for 32 nm processes. This document
incorporates the experience of conducting previous DTM in
multiple tests during the 300 mm transition. The 450 DTM is
composed of three stages: determine the maturity of the tool or
process to be tested, select/execute the appropriate testing, and
report the test results in a standardized format.

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