SEMATECH DOC ID #: 10065097A-TR

Title: 2010 ISMI Semiconductor Greenhouse Gas (GHG) Reporting Rule Survey Results

Author(s): Laurie Beu;Steve Trammell;Walter Worth;

Document date: 06/10/2010

Descriptor(s): cost analysis;government regulations;greenhouse effect;point of use abatement;

Abstract:  This report from the ESHI004M project presents the results and analysis of
the International SEMATECH Manufacturing Initiative (ISMI) 2010 Semiconductor
Industry Process Greenhouse Gas (GHG)Survey, the Technical Support Document
(TSD), and the Economic Impact Assessment (EIA) in response to the
U.S. Environmental Protection Agency (EPA) Proposed Mandatory Reporting of
Greenhouse Gases (GHG): Additional Sources of Fluorinated GHGs. Included is a
comparison of reproposed rule requirements for fluorinated greenhouse gas
heel determination, consumption estimation, point-of-use abatement
requirements, and recordkeeping and reporting with industry practice; an
estimate of the semiconductor industry burden to comply with these
requirements; and an analysis of the EPAs uncertainty analysis to support
the reproposed rule Refined Method Default Emissions process sub-categories.
A companion report, Technology Transfer #10065098A-ENG, presents the results
of a supplemental survey asking for comments about and cost information
associated with data collection and annual data reporting under the
reproposed rule.

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