92010958B-STD Abstract: SEMATECH Provisional Test Method for Determining the Surface Associated Biofilms of Ultrapure Water (UPW) Distribution Systems

SEMATECH DOC ID #: 92010958B-STD

Title: SEMATECH Provisional Test Method for Determining the Surface Associated Biofilms of Ultrapure Water (UPW) Distribution Systems

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;biofilms;surface tests;test methods;

Abstract: This test method is used to determine the presence of biofilms on all
functional surfaces of plastic components used in ultrapure water distribution
systems. It can be used either before the components are installed or after
they are in place. Parts that are in service, however, may require removal
and disassembly, and may, therefore, be destroyed. This document is in
development as an industry standard by Semiconductor Equipment and Materials
International (SEMI). When available, adherence to the SEMI standard is
recommended.

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