SEMATECH DOC ID #: 92010957B-STD

Title: SEMATECH Provisional Test Method for Optical Analysis of Ion-Exchange Resin Beads Used in Ultrapure Water (UPW) Distribution Systems

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;ion exchange resin beads;optical measurement;purification;

Abstract:  This test method defines the procedure for optical testing of the physical
integrity of ion-exchange resin materials (beads) used in the water
purification process. The procedure uses an optical microscope at 20X
magnification to determine the physical integrity of the beads. This document
is in development as an industry standard by Semiconductor Equipment and
Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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