92010956B-STD Abstract: SEMATECH Provisional Test Method for Analyzing the Plastic Surface Composition and Chemical Binding of Compnts of UPW Dist. Systems (ESCA) Method)

SEMATECH DOC ID #: 92010956B-STD

Title: SEMATECH Provisional Test Method for Analyzing the Plastic Surface Composition and Chemical Binding of Compnts of UPW Dist. Systems (ESCA) Method)

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;surface tests;electron spectroscopy for chemical analysis;surface composition;test methods;

Abstract: This test method uses electron spectroscopy for chemical analysis (ESCA) to
test plastic parts for surface composition and chemical bonding. The
objective is to define a general set of instrument parameters and conditions
that will achieve accurate and reproducible measurements of surface
composition and chemical species. The test method applies to all plastic
components of ultrapure water distribution systems. This document is in
development as an industry standard by Semiconductor Equipment and Materials
International (SEMI). When available, adherence to the SEMI standard is
recommended.

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