92010955B-STD Abstract: SEMATECH Provisional Test Method for Analyzing the Plastic Surface Condition of Ultrapure Water (UPW) Distribution System Components (SEM Method)

SEMATECH DOC ID #: 92010955B-STD

Title: SEMATECH Provisional Test Method for Analyzing the Plastic Surface Condition of Ultrapure Water (UPW) Distribution System Components (SEM Method)

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;surface tests;roughness;scanning electron microscopy;test methods;

Abstract: This test method uses a scanning electron microscope (SEM) to test the
functional surfaces of plastic components for surface morphology and for
identification of inclusions on surfaces. It may be used to evaluate
imperfections or defects of 0.1 micron or larger. The method applies to
components such as pipes, tubing, fittings, and valves being considered for
use in ultrapure water distribution systems. This document is in development
as an industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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