92010954B-STD Abstract: SEMATECH Provisional Test Method for Determining Surface Roughness of UPW Distribution Sys. Compnts (Noncontact Optical Profiling)

SEMATECH DOC ID #: 92010954B-STD

Title: SEMATECH Provisional Test Method for Determining Surface Roughness of UPW Distribution Sys. Compnts (Noncontact Optical Profiling)

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;surface tests;roughness;optical measurement;test methods;

Abstract: This test method provides noncontact optical techniques for measuring surface
roughness of plastic surfaces with an average roughness between 0.01 micron
and 1 micron. It applies to plastic components being considered for
installation into ultrapure water distribution systems. This document is in
development as an industry standard by Semiconductor Equipment and Materials
International (SEMI). When available, adherence to the SEMI standard is
recommended.

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