92010953B-STD Abstract: SEMATECH Provisional Test Method for Determining the Surface Roughness of Ultrapure Water (UPW) Distribution System Components (STM Method)

SEMATECH DOC ID #: 92010953B-STD

Title: SEMATECH Provisional Test Method for Determining the Surface Roughness of Ultrapure Water (UPW) Distribution System Components (STM Method)

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;surface tests;roughness;scanning tunneling microscopy;test methods;

Abstract: This test method uses scanning tunneling microscopy (STM) to obtain
three-dimensional topographical maps of the surface of plastic parts being
considered for use in ultrapure water distribution systems. It applies to the
characterization of plastic surfaces within a Zmax (maximum height difference
over entire surface) of 5 microns or less per scan. This document is in
development as an industry standard by Semiconductor Equipment and Materials
International (SEMI). When available, adherence to the SEMI standard is
recommended.

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