92010952B-STD Abstract: SEMATECH Provisional Test Method for Determining the Surface Roughness of Ultrapure Water (UPW) Distribution System Components (AFM Method)

SEMATECH DOC ID #: 92010952B-STD

Title: SEMATECH Provisional Test Method for Determining the Surface Roughness of Ultrapure Water (UPW) Distribution System Components (AFM Method)

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;surface tests;roughness;atomic force microscopy;test methods;

Abstract: This test method uses atomic force microscopy (AFM) to obtain
three-dimensional topographic maps of surfaces of plastic components that are
being considered for use in ultrapure water distribution systems. It applies
to the characterization of plastic surfaces with a Zmax (maximum height
difference over entire surface) of 5 microns or less per scan. This document
is in development as an industry standard by Semiconductor Equipment and
Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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