92010951B-STD Abstract: SEMATECH Provisional Test Method for Optical Analysis of Plastic Surface Condition of Ultrapure Water (UPW) Distribution System Components

SEMATECH DOC ID #: 92010951B-STD

Title: SEMATECH Provisional Test Method for Optical Analysis of Plastic Surface Condition of Ultrapure Water (UPW) Distribution System Components

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;plastic piping;plastic valves;surface tests;optical measurement;roughness;test methods;

Abstract: This test method provides a means of testing functional surfaces of plastic
components for gross surface morphology (imperfections or defects). It
applies to pipes, fittings, and valves being considered for installation into
ultrapure water distribution systems. This document is in development as an
industry standard by the Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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