92010950B-STD Abstract: SEMATECH Provisional Test Method for Visual Characterization of Surface Roughness for Plastic Surfaces of UPW Distribution System Components

SEMATECH DOC ID #: 92010950B-STD

Title: SEMATECH Provisional Test Method for Visual Characterization of Surface Roughness for Plastic Surfaces of UPW Distribution System Components

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;surface tests;visual inspection;roughness;test methods;

Abstract: This document describes a technique for preparing test specimens of plastic
ultrapure water distribution system components and defines a method for
visually characterizing the prepared specimens. The doucment includes an
appendix that contains information on other analytical techniques that may
provide greater resolution of surface defects and topography (roughness). The
method applies to all surfaces of plastic components used in ultrapure water
distribution systems. This document is in development as an industry standard
by Semiconductor Equipment and Materials International (SEMI). When
available, adherence to the SEMI standard is recommended.

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