92010949B-STD Abstract: SEMATECH Provisional Test Method for Determining Particle Contribution and Retention by Ultrapure Water (UPW) Distribution System Components

SEMATECH DOC ID #: 92010949B-STD

Title: SEMATECH Provisional Test Method for Determining Particle Contribution and Retention by Ultrapure Water (UPW) Distribution System Components

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;piping;fittings;valves;filters;pressure regulators;particle generation;contamination;

Abstract: This test method provides a procedure for determining statistically
significant particle retention and shedding comparisons between ultrapure
water distribution system components that are tested under representative
conditions. The document contains three annexes that describe methods for
characterizing and qualifying particles. The method is intended for piping
and fittings, valves, pressure regulators, filters and filter housings. This
document is in development as an industry standard by Semiconductor Equipment
and Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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