SEMATECH DOC ID #: 92010948B-STD

Title: SEMATECH Provisional Test Method for Determining the Hydraulic Burst Pressure of Ultrapure Water (UPW) Distribution System Components

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;plastic piping;pressure measurement;failure testing;test methods;

Abstract:  This test method provides a procedure for determining the burst pressure of
plastic components used in UPW distribution systems. It is applicable to
products in which all parts that are in contact with the fluid media are
plastic. This document is in development as an industry standard by
Semiconductor Equipment and Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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