92010947B-STD Abstract: SEMATECH Provisional Test Method for Leak Testing Tube Fitting Connections Used in Ultrapure Water (UPW) Distribution Systems

SEMATECH DOC ID #: 92010947B-STD

Title: SEMATECH Provisional Test Method for Leak Testing Tube Fitting Connections Used in Ultrapure Water (UPW) Distribution Systems

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;seals;leakage;tube fittings;

Abstract: This test method provides an immersion leak test method applicable to tube
fitting connections used in UPW distribution systems. It is intended for
testing the integrity of the fitting connection with no externally applied
load. It is applicable to tube fitting connections in which all parts in
contact with the media are constructed of plastic materials. This document is
in development as an industry standard by Semiconductor Equipment and
Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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