92010946B-STD Abstract: SEMATECH Provisional Test Method for Determining the Seat Leakage of Control Valves Used in UPW Distribution Systems (Bubble Leak Detection) Detectio

SEMATECH DOC ID #: 92010946B-STD

Title: SEMATECH Provisional Test Method for Determining the Seat Leakage of Control Valves Used in UPW Distribution Systems (Bubble Leak Detection) Detectio

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;plastic valves;leakage;seals;

Abstract: The purpose of this test method is to provide a uniform procedure for
determining the sealing characteristics across the internal sealing area
(seat) of plastic valve products used in ultrapure water (UPW) distribution
systems. This document is in development as an industry standard by
Semiconductor Equipment and Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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