92010945B-STD Abstract: SEMATECH Provisional Test Method for Determining the Operational Pressure of Plastic Valves Used in Ultrapure Water (UPW) Distribution Systems

SEMATECH DOC ID #: 92010945B-STD

Title: SEMATECH Provisional Test Method for Determining the Operational Pressure of Plastic Valves Used in Ultrapure Water (UPW) Distribution Systems

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;plastic valves;pressure measurement;

Abstract: This test method provides a uniform method for verifying the pressure and
temperature ratings of plastic valves used in ultrapure water (UPW)
distribution systems by operating the valves while they are exposed to fluid
media. It is intended for valves in which all parts in contact with the fluid
media are plastic. It is applicable in a temperature range between 15 degrees
C and 205 degrees C. This document is in development as an industry standard
by Semiconductor Equipment and Materials International (SEMI). When
available, adherence to the SEMI standard is recommended.

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