92010944B-STD Abstract: SEMATECH Provisional Test Method for Pressure Proof Testing Filter Cartridges Used in Ultrapure Water (UPW) Distribution Systems

SEMATECH DOC ID #: 92010944B-STD

Title: SEMATECH Provisional Test Method for Pressure Proof Testing Filter Cartridges Used in Ultrapure Water (UPW) Distribution Systems

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;filters;flow rates;pressure measurement;

Abstract: This test method is used to determine mechanical pressure resistance of filter
cartridges for UPW distribution systems. It is used to verify that filter
cartridges will withstand their rated pressurization without integrity failure
or permanent mechanical deformation. This document is in development as an
industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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