92010943B-STD Abstract: SEMATECH Provisional Test Method for Pressure Leak Testing Filter Cartridges Used in Ultrapure Water (UPW) Distribution Systems

SEMATECH DOC ID #: 92010943B-STD

Title: SEMATECH Provisional Test Method for Pressure Leak Testing Filter Cartridges Used in Ultrapure Water (UPW) Distribution Systems

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;filters;leakage;

Abstract: This procedure provides a uniform method for detecting leakage in a cartridge
filter by gas pressurization while the test specimen is submerged in a liquid
of low surface tension. It is intended for verifying the assembly integrity
of filter cartridges for ultrapure water distribution systems. This document
is in development as an industry standard by Semiconductor Equipment and
Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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