92010941B-STD Abstract: SEMATECH Provisional Test Method for Pressure Cycle Testing Filter Cartridges Used in Ultrapure Water (UPW) Distribution Systems

SEMATECH DOC ID #: 92010941B-STD

Title: SEMATECH Provisional Test Method for Pressure Cycle Testing Filter Cartridges Used in Ultrapure Water (UPW) Distribution Systems

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;filters;fatigue tests;pressure measurement;test methods;

Abstract: This test method provides a standardized method for determining the pressure
cycle fatigue characteristics of cartridge filters. It can be used to verify
mechanical pressure resistance of filter cartridges, to confirm that a filter
cartridge can withstand exceptional conditions of use, and to comparatively
quantify the loss of mechanical strength due to exposure to exceptional
conditions. This document is in development as an industry standard by
Semiconductor Equipment and Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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