92010940B-STD Abstract: SEMATECH Provisional Test Method for Determining the Water Retention Capacity of Ion-Exchange Resins Used in UPW Distribution Systems

SEMATECH DOC ID #: 92010940B-STD

Title: SEMATECH Provisional Test Method for Determining the Water Retention Capacity of Ion-Exchange Resins Used in UPW Distribution Systems

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;ion exchange resins;

Abstract: This test method determines the amount of water retained by hydrated
ion-exchange resins. Procedures are provided for cation, anion, and mixed-bed
resins. The method is applicable to both new and used resins. This document
is in development as an industry standard by Semiconductor Equipment and
Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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