92010939B-STD Abstract: SEMATECH Provisional Test Method for Evaluating Bulk Polymer Samples of Ultrapure Water (UPW) Distrib. System Components (DSC & TGA Methods)

SEMATECH DOC ID #: 92010939B-STD

Title: SEMATECH Provisional Test Method for Evaluating Bulk Polymer Samples of Ultrapure Water (UPW) Distrib. System Components (DSC & TGA Methods)

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;polymers;thermal properties;differential scanning calorimetry;thermal gravimetric analysis;

Abstract: This test method uses thermal analysis techniques to examine polymeric samples
used in ultrapure water distribution system components. Comparison of the
sample to a reference standard provides indications of performance
characteristics of the resin (chemical inertness, thermal stability) and
physical properties of the polymer resin (crystallinity, molecular weight,
morphology). The procedure uses differential scanning calorimetry (DSC) and
thermal gravimetric analysis (TGA). This document is in development as an
industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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