92010938B-STD Abstract: SEMATECH Provisional Test Method for Determining Bulk Trace Metals in Polymer Materials of Ultrapure Water (UPW) Distribution System Components

SEMATECH DOC ID #: 92010938B-STD

Title: SEMATECH Provisional Test Method for Determining Bulk Trace Metals in Polymer Materials of Ultrapure Water (UPW) Distribution System Components

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;trace inorganic contaminants;polymers;inductively coupled plasma mass spectroscopy;bulk analysis;absorption;test methods;

Abstract: This test method provides a procedure for determining the nonvolatile trace
inorganic impurities in bulk polymeric material used for components of UPW
distribution system. It can be used with inductively coupled plasma-mass
spectrometry (recommended), graphite furnace atomic absorption spectroscopy,
or inductively coupled plasma atomic emission spectroscopy. It is intended
for UPW components including tubing, piping, fittings, valves, regulators,
filter housings and cartridges, o-rings, gaskets, and ion-exchange resins.
This document is in development as an industry standard by Semiconductor
Equipment and Materials International (SEMI). When available, adherence to
the SEMI standard is recommended.

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