SEMATECH DOC ID #: 92010937B-STD

Title: SEMATECH Provisional Test Method for the Evaluation of Bulk Polymer Samples of Ultrapure Water (UPW) Distribution Systems Components

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;Fourier transform infrared spectroscopy;bulk analysis;polymers;test methods;

Abstract:  This test method uses Fourier transform infrared spectroscopy to examine bulk
polymer samples of UPW distribution system components. It is intended to
qualitatively verify the chemical structure of a polymer resin by comparing
the sample's mid-infrared spectrum with that of a reference standard. This
document is in development as an industry standard by Semiconductor Equipment
and Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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