92010936B-STD Abstract: SEMATECH Provisional Test method for Determining Leachable Trace Inorganics in Ultrapure Water (UPW) Distribution System Components

SEMATECH DOC ID #: 92010936B-STD

Title: SEMATECH Provisional Test method for Determining Leachable Trace Inorganics in Ultrapure Water (UPW) Distribution System Components

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;tubing;fittings;valves;piping;filters;pressure regulators;trace inorganic contaminants;o ring seals;absorption;

Abstract: This test method provides a procedure for the determination of trace
inorganic impurities that leach from a water distribution system component
into ultrapure water. Samples are analyzed for trace metals by inductively
coupled plasma-mass spectrometry (ICP-MS) and graphite furnace atomic
absorption spectroscopy (GFAAS); for cations and anions by ion chromatography
(IC); and for silica by colorimetry. It is intended for UPW components
including tubing, piping, fittings, valves, regulators, filter housings,
filter cartridges, o-rings, gaskets, and ion-exchange resins. This document
is in development as an industry standard by Semiconductor Equipment and
Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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