SEMATECH DOC ID #: 92010935B-STD

Title: SEMATECH Provisional Test Method for Electrical Resistivity of Ultrapure Water (UPW)

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;test methods;electrical resistivity;ultrapure water;

Abstract:  This test method provides a procedure for determining the electrical
resistivity of water. It can be used to detect ionizing impurities dissolved
in treated waters prepared for electronics manufacturing facilities. It is
intended for UPW components including tubing, piping, fittings, valves,
regulators, filter housings and vessels, and filter cartridges, o-rings,
gaskets, and ion-exchange resins. This document is in development as an
industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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