92010934B-STD Abstract: SEMATECH Provisional Test Method for Sample Preparation for Chemical Testing of Ultrapure Water (UPW) Distribution System Components

SEMATECH DOC ID #: 92010934B-STD

Title: SEMATECH Provisional Test Method for Sample Preparation for Chemical Testing of Ultrapure Water (UPW) Distribution System Components

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;chemical tests;sample preparation;test methods;

Abstract: This document defines the sample pretreatment and preparation procedures for
chemical testing of UPW distribution components. It includes sample
preparation techniques that can be applied to the prepared samples derived
from piping, tubing, fittings, valves, regulators, filter housings, filter
cartridges, o-rings, gaskets, and ion-exchange resins. This document is in
development as an industry standard by Semiconductor Equipment and Materials
International (SEMI). When available, adherence to the SEMI standard is
recommended.

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