SEMATECH DOC ID #: 92010933B-STD

Title: SEMATECH Guide to Test Methods for Ultrapure Water (UPW) Distribution System Components

Author(s): Jeff Riddle;

Document date: 06/26/1992

Descriptor(s): ultrapure water distribution systems;surface tests;mechanical tests;

Abstract:  Because of the great variety of components used in ultrapure water (UPW)
distribution systems and their different designs, a variety of procedures is
necessary. This guide provides a brief overview of the applicable procedures
for evaluating the performance characteristics of UPW distribution system
components. The purpose for using these test methods is to enable
improvements in manufacturing of UPW components, and to empower the user or
purchaser of components to make better decisions regarding cost versus
quality. Four categories of test method matrices are given (one for
particles, two for chemical, and two for surface tests). The type of
components covered by the test procedures described include: tubing and
piping; fittings, regulators; valves; filter housing and cartridges; o-rings,
gaskets; and ion exchange resins. The matrices show the identification number
of the test method suitable for use with a given component. Each applicable
test method is then briefly summarized, describing the method's intended use.
This document is in development as an industry standard by Semiconductor
Equipment and Materials International (SEMI). When available, adherence to
the SEMI standard is recommended.

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