SEMATECH DOC ID #: 09125069A-ENG

Title: Semiconductor Key Environment Performance Indicators Guidance

Author(s): Laurie Beu;Martha Montemayor-Rapier;

Document date: 12/18/2009

Descriptor(s): chemicals;environment, safety, and health;materials;global climate change;waste management;water;

Abstract:  This report from the ESHI004 project describes a set of Key
Environmental Performance Indicators (KEPIs) that quantitatively
measures the environmental impact of semiconductor products. The
KEPIs capture global warming, water use, chemical use, and waste
generation impacts. When applied, they will provide the industry
with a consistent set of product key environmental performance
indicators.