SEMATECH DOC ID #: 09125066B-TR

Title: ISMI Enhanced Equipment Quality Assurance (EEQA) General Guidelines

Author(s): Gino Crispieri;

Document date: 04/12/2010

Descriptor(s): equipment improvement;factory productivity;

Abstract:  This set of guidelines from the MFGM056M project provides the
general requirements for Enhanced Equipment Quality Assurance
(EEQA). Its ultimate goal is to help device makers and equipment
suppliers collaborate in defining the steps necessary to address
the improvement of overall equipment productivity inside the
factory. This revision reflects updates based on feedback from
the EEQA working group and select industry experts.

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