SEMATECH DOC ID #: 09055011B-ENG

Title: Equipment Data Acquisition (EDA) Change Summary: November 2005 to July 2010

Author(s): Lance Rist;

Document date: 06/17/2010

Descriptor(s): 

Abstract:  As a result of a "freeze" declared by International SEMATECH Manufacturing
Initiative (ISMI) members, all commercial implementations of the Equip-
ment Data Acquisition (EDA) interface (i.e. Interface A) have been based on
the 1105 (Nov 2005) version of the related SEMI standards. In 2010, ISMI's
members declared a new EDA freeze that includes improvements made to the
SEMI standards in the intervening time. This new freeze is based on the
standards current as of the release date of the 0710 (Jul 2010) version.
This document from the MFGM065M project lists and explains those changes from
the 1105 release to the 0710 release.

To Document

© Copyright 2012 SEMATECH, Inc.
Please read these important Trademark and legal notices