SEMATECH DOC ID #: 08054929A-TR

Title: Recipe and Parameter (RaP) Management Usage Scenarios

Author(s): Lance Rist;

Document date: 05/07/2008

Descriptor(s): e-manufacturing;factory automation;process control;process recipes;recipes;recipe management;

Abstract:  This guideline provides basic usage scenarios and common behavior
for systems utilizing Recipe and Parameter (RaP) Management
capabilities as defined in SEMI E139. This models the anticipated
mode of operation of ISMI member companies. The focus of the
usage scenarios is normal operations. Exceptions are considered
and discussed, but coverage of in-depth error handling use cases
awaits more extensive feedback from the field. Definition of
common usage is intended to result in more uniform
implementations, leading to higher quality and lower cost of
ownership.

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