91060573B-STD Abstract: SEMASPEC Test Method for AES Analysis of Surface and Oxide Composition of Electropolished Stainless Steel Tubing for Gas Distribution System Component

SEMATECH DOC ID #: 91060573B-STD

Title: SEMASPEC Test Method for AES Analysis of Surface and Oxide Composition of Electropolished Stainless Steel Tubing for Gas Distribution System Component

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): stainless steel tubing;auger emission spectroscopy;surface composition;defect sources;facilities;gas distribution systems;specifications;components;component testing;gas purity;test methods;standards;

Abstract: This SEMASPEC defines a method of testing the interior surface of chromium
enhanced stainless steel tubing, fittings, and valves to determine the surface
composition and chemistry and thereby measure the effectiveness of
electropolishing. The purpose of this procedure is to evaluate components
considered for use in ultra-high purity gas distribution systems. Application
of this test method is expected to yield comparable data among components
tested for the purposes of qualification for installation. This document is
in development as an industry standard by Semiconductor Equipment and
Materials International (SEMI). When available, adherence to the SEMI
standard is recommended.

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