90120404B-STD Abstract: SEMASPEC Test Method for Determination of Surface Roughness by Scanning Tunneling Microscopy (STM) for Gas Distribution System Components

SEMATECH DOC ID #: 90120404B-STD

Title: SEMASPEC Test Method for Determination of Surface Roughness by Scanning Tunneling Microscopy (STM) for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): component testing;scanning tunneling microscopy;roughness;test methods;defect sources;facilities;gas distribution systems;specifications;components;

Abstract: This SEMASPEC defines a method of testing surface features in the nanometer
size range. Three-dimensional data can be obtained from a surface, which can
then be used to produce a model of the surface texture or to measure surface
morphology. The purpose of this procedure is to evaluate components
considered for use in ultra-high gas distribution systems. Application of
this test method is expected to yield comparable data among components tested
for the purposes of qualification for installation. This document is in
development as an industry standard by Semiconductor Equipment and Materials
International (SEMI). When available, adherence to the SEMI standard is
recommended.

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