90120402B-STD Abstract: SEMASPEC Test Method for Energy Dispersive X-Ray (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components

SEMATECH DOC ID #: 90120402B-STD

Title: SEMASPEC Test Method for Energy Dispersive X-Ray (EDX) Analysis of Metallic Surface Condition for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): defect sources;facilities;gas distribution systems;specifications;components;component testing;surface composition;energy dispersive x-ray spectrometers;test methods;gas purity;standards;

Abstract: This SEMASPEC establishes a method for comparing the elemental composition of
normal surfaces with any defects found on the surfaces of metal tubing,
fittings, valves, or any metal component. Its purpose is to evaluate
components considered for use in ultra-high purity gas distribution systems.
Application of this test method is expected to yield comparable data among
components tested for the purposes of qualification for installation.
This document has been revised and adopted as ASTM F1375 and is provided for
information only. Adherence to the industry standard is recommended.

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