90120401B-STD Abstract: SEMASPEC Test Method for Scanning Electron Microscopy (SEM) Analysis of Metallic Surface Condition for Gas Distribution System Components

SEMATECH DOC ID #: 90120401B-STD

Title: SEMASPEC Test Method for Scanning Electron Microscopy (SEM) Analysis of Metallic Surface Condition for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): surface morphology;defect sources;facilities;gas distribution systems;specifications;components;component testing;scanning electron microscopes;gas purity;standards;test methods;

Abstract: This SEMASPEC establishes a method of testing interior surfaces of components
such as tubing, fittings, and valves for surface morphology. Its purpose is
to evaluate components considered for use in ultra-high purity gas
distribution systems. Application of this test method is expected to yield
comparable data among components tested for the purpose of qualification for
installation. This document has been revised and adopted as ASTM F1372 and is
provided for information only. Adherence to the industry standard is
recommended.

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