90120400B-STD Abstract: SEMASPEC Test Method for Determination of Surface Roughness by Contact Profilometry for Gas Distribution System Components

SEMATECH DOC ID #: 90120400B-STD

Title: SEMASPEC Test Method for Determination of Surface Roughness by Contact Profilometry for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): roughness;facilities;gas distribution systems;specifications;components;component testing;gas purity;test methods;

Abstract: This SEMASPEC describes the determination of numerical values for surface
roughness of components used in ultra-high purity gas distribution systems.
Application of this test method is expected to yield comparable data among
components tested for the purposes of qualification for installation.
This document is in development as an industry standard by Semiconductor
Equipment and Materials International (SEMI). When available, adherence to
the SEMI standard is recommended.

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