90120399B-STD Abstract: SEMASPEC Test Method for Determination of Ionic/Organic Extractables of Internal Surfaces - IC/GC/FTIR for Gas Distribution System Components

SEMATECH DOC ID #: 90120399B-STD

Title: SEMASPEC Test Method for Determination of Ionic/Organic Extractables of Internal Surfaces - IC/GC/FTIR for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): contamination;gaseous contaminants;defect sources;facilities;gas distribution systems;specifications;components;component testing;gas purity;test methods;

Abstract: This SEMASPEC establishes a method for testing components used in ultra-high
purity gas distribution systems for ionic and organic surface residues.
Application of this test method is expected to yield comparable data among
components tested for the purposes of qualification for installation.
This document is in development as an industry standard by Semiconductor
Equipment and Materials International (SEMI). When available, adherence to
the SEMI standard is recommended.

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