SEMATECH DOC ID #: 90120397B-STD

Title: SEMASPEC Test Method for Determination of Moisture Contribution by Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): contamination;gaseous contaminants;defect sources;facilities;gas distribution systems;specifications;components;component testing;test methods;

Abstract:  This SEMASPEC establishes a method for testing components for total moisture
contribution to a gas distribution system at ambient temperature. This test
method also allows testing at elevated ambient temperatures as high as 50
degrees C. Application of this test method is expected to yield comparable
data among components tested for the purposes of qualification for
installation. This document is in development as an industry standard by
Semiconductor Equipment and Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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