SEMATECH DOC ID #: 90120394B-STD

Title: SEMASPEC Test Method for Determination of Valve Flow Coefficient for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): equipment performance;valves;facilities;gas distribution systems;specifications;components;component testing;flow rates;test methods;

Abstract:  This SEMASPEC establishes a test method for determining the flow coefficient
(Cv) of a valve for use in gas service. Application of this test method is
expected to yield comparable data among components tested for the purposes of
qualification for installation. This document is in development as an
industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended.

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