90120393B-STD Abstract: SEMASPEC Test Method for Determination of Filter Flow Pressure Drop Curves for Gas Distribution System Components

SEMATECH DOC ID #: 90120393B-STD

Title: SEMASPEC Test Method for Determination of Filter Flow Pressure Drop Curves for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): equipment specifications;equipment performance;gas filters;facilities;gas distribution systems;components;component testing;flow rates;pressure;test methods;

Abstract: This SEMASPEC establishes a test method for preparing a flow rate vs. pressure
drop curve for filters being considered for installation into a high-purity
gas distribution system. Application of this test method is expected to yield
comparable data among components tested for the purposes of qualification for
installation. This document is in development as an industry standard by
Semiconductor Equipment and Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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