SEMATECH DOC ID #: 90120392B-STD

Title: SEMASPEC Test Method for Determination of Regulator Performance Characteristics for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): equipment performance;facilities;gas distribution systems;specifications;components;component testing;test methods;

Abstract:  This SEMASPEC defines a method for quantifying regulator performance
characteristics for regulators being considered for installation into a gas
distribution system. Application of these test methods are expected to yield
comparable data among components tested for the purposes of qualification for
installation. This document is in development as an industry standard by
Semiconductor Equipment and Materials International (SEMI). When available,
adherence to the SEMI standard is recommended.

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