SEMATECH DOC ID #: 90120391B-STD

Title: SEMASPEC Test Method for Determination of Helium Leak Rate for Gas Distribution System Components

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): contamination;gaseous contaminants;defect sources;facilities;gas distribution systems;specifications;components;component testing;test methods;

Abstract:  This SEMASPEC describes the SEMATECH test methods for leak testing components
being considered for installation into a high-purity gas distribution system
using a helium mass spectrometer leak detector. Application of this test
method is expected to yield comparable data among components tested for the
purposes of qualification for installation. This document is in development
as an industry standard by Semiconductor Equipment and Materials International
(SEMI). When available, adherence to the SEMI standard is recommended

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