SEMATECH DOC ID #: 90120390B-STD

Title: SEMASPEC Test Method for Determination of Particle Contribution by Valves in Gas Distribution Systems

Author(s): Jeff Riddle;

Document date: 04/01/1993

Descriptor(s): contamination;contaminants;particles;defect sources;facilities;gas distribution systems;specifications;components;component testing;test methods;

Abstract:  This SEMASPEC describes the SEMATECH test methods for obtaining statistically
significant comparisons of particulate generation performance of valves and
other gas distribution components under aggressive testing conditions.
Application of this test method is expected to yield comparable data among
components tested for the purposes of qualification for installation.
This document has been adopted as ASTM F1394 and is provided for information
only. Adherence to the industry standard is recommended.

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