02064276A-ENG Abstract: Guidelines for the Installation and Alignment of 300 mm Overhead Transport Systems (OTS) and Load Port Interfaces

SEMATECH DOC ID #: 02064276A-ENG

Title: Guidelines for the Installation and Alignment of 300 mm Overhead Transport Systems (OTS) and Load Port Interfaces

Author(s): Giovanni Ghezzi;Lorn Christal;

Document date: 06/19/2002

Descriptor(s): 300 mm wafers;automated materials handling;procedures;overhead transport;equipment installation;standards;

Abstract: This document from the MFGM009 project provides high-level
guidelines for installing and aligning overhead transport systems
(OTS) and 300 mm process equipment. Two specific scenarios are
addressed: the installation and alignment of process tools after
an OTS is in place and the installation and alignment of an OTS
after process tools are in place Three maintenance operations for
process tools and the OTS are also included: periodic checks,
preventive maintenance (PM) checks, and re-checks after a
catastrophic event. In addition, the installation of monuments
and reticle-handling systems is discussed.

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