SEMATECH DOC ID #: 97123416B-TR

Title: Metrics for 300 mm Automated Material Handling Systems (AMHS) and Production Equipment Interfaces: Revision 1.0

Author(s): Eddy Bass;Paul Jai;

Document date: 12/15/1998

Descriptor(s): 300 mm wafers;equipment performance;wafer size conversion;standards;automated materials handling;FOUP;

Abstract:  This document represents the expectations that the International 300 mm
Initiative (I300I) member companies have for the performance of 300 mm
automated material handling equipment and production equipment interfaces in
1998. These metrics will be used as targets for I300I material handling
equipment and production equipment interface demonstrations in 1998. They
were developed and agreed upon in consensus by the I300I Factory Integration
Working Groups (FIWGs) during international meetings held in 1997. This
version of the document includes metrics for wafer sorters and FOUP cleaners
that were not available when 97123416A-TR was published.

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